JPH0727071Y2 - 切粉除去装置 - Google Patents

切粉除去装置

Info

Publication number
JPH0727071Y2
JPH0727071Y2 JP9177090U JP9177090U JPH0727071Y2 JP H0727071 Y2 JPH0727071 Y2 JP H0727071Y2 JP 9177090 U JP9177090 U JP 9177090U JP 9177090 U JP9177090 U JP 9177090U JP H0727071 Y2 JPH0727071 Y2 JP H0727071Y2
Authority
JP
Japan
Prior art keywords
cut
plate
air
carry
chips
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9177090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447949U (en]
Inventor
哲 浅田
義信 水上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kubota Corp
Original Assignee
Kubota Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kubota Corp filed Critical Kubota Corp
Priority to JP9177090U priority Critical patent/JPH0727071Y2/ja
Publication of JPH0447949U publication Critical patent/JPH0447949U/ja
Application granted granted Critical
Publication of JPH0727071Y2 publication Critical patent/JPH0727071Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Auxiliary Devices For Machine Tools (AREA)
JP9177090U 1990-08-31 1990-08-31 切粉除去装置 Expired - Lifetime JPH0727071Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9177090U JPH0727071Y2 (ja) 1990-08-31 1990-08-31 切粉除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9177090U JPH0727071Y2 (ja) 1990-08-31 1990-08-31 切粉除去装置

Publications (2)

Publication Number Publication Date
JPH0447949U JPH0447949U (en]) 1992-04-23
JPH0727071Y2 true JPH0727071Y2 (ja) 1995-06-21

Family

ID=31827689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9177090U Expired - Lifetime JPH0727071Y2 (ja) 1990-08-31 1990-08-31 切粉除去装置

Country Status (1)

Country Link
JP (1) JPH0727071Y2 (en])

Also Published As

Publication number Publication date
JPH0447949U (en]) 1992-04-23

Similar Documents

Publication Publication Date Title
EP0834906A3 (en) Device for transferring a semiconductor wafer
JPH0727071Y2 (ja) 切粉除去装置
JPH0735478A (ja) エアーナイフ装置
JPH11271704A (ja) 液晶表示素子の製造方法およびダスト除去装置
JPH0650987Y2 (ja) ウエハ吸着保持装置
JPS6018233B2 (ja) 塵埃除去装置
JPS59117235A (ja) ウエハブレ−キング方法および装置
JP2000218620A (ja) 無塵ゴム練り機
JPH01164550A (ja) モールドバリ除去装着
JPS63126626A (ja) 加工装置
JPH03154680A (ja) 除塵方法
JPH0798318B2 (ja) ダスト捕集装置
JP2016036752A (ja) 横方向除塵装置
CN214933550U (zh) 一种流水线传送带除尘装置
JPH0738284A (ja) 異物除去装置
JPH07181467A (ja) 基板のクリーニング方法およびその装置
JPS6387728A (ja) ダイボンデイング装置
JP2008173746A (ja) ハンドラー装置
JP3054155U (ja) 循環式屑取機
US6857161B2 (en) Dust withdrawal arrangement
JPH0342687Y2 (en])
JPS59232796A (ja) マ−ジナルパンチ加工機におけるパンチ粕除去装置
JPH0332776A (ja) 飛散ダスト回収工法
JPH02298045A (ja) 半導体基板検査装置
JPS6436888A (en) Door for clean room, etc.